Chip-scale short-wavelength infrared InGaAs microspectrometer based on a linear variable optical filter
نویسندگان
چکیده
An extended short-wavelength infrared microspectrometer by monolithic integrarion of a 256 × 1 InGaAs linear array detector with wedge-shaped Si/SiO 2 Fabry-Perot variable optical filter.
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ژورنال
عنوان ژورنال: Journal of Materials Chemistry C
سال: 2023
ISSN: ['2050-7526', '2050-7534']
DOI: https://doi.org/10.1039/d3tc01239e